INTERNATIONAL PATENT: CARL ZEISS SMT GMBH FILES APPLICATION FOR "METHOD FOR PRODUCING AN OPTICAL IMAGING SYSTEM FOR A MICROLITHOGRAPHY SYSTEM"

GENEVA, Aug. 24 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Str. 273447 Oberkochen) filed a patent application (PCT/EP2025/051262) for "METHOD FOR PRODUCING AN OPTICAL IMAGING SYSTEM FOR A MICROLITHOGRAPHY SYSTEM" on Jan 20, 2025. With publication no. WO/2025/171994, the details related to the patent application was published on Aug 21, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): STREIT-NIEROBISCH, Simone (Rudolf-Eber-StraBe 273447 Oberkochen), GATZWEILER, Alfred (Rudolf-Eber-StraBe 273447 Oberkochen), KRAUS, Hans-Jurgen (Rudolf-Eber-StraBe 273447 Oberkochen), SCHUNCK, Matthias (Rudolf-Eber-Stra...