GENEVA, May 18 -- CARL ZEISS SMT GMBH (Rudolf-Eber-StraBe 273447 Oberkochen) filed a patent application (PCT/EP2024/081270) for "METHOD FOR PRODUCING A SURFACE COATING WHICH REFLECTS EUV RADIATION" on Nov 06, 2024. With publication no. WO/2025/099029, the details related to the patent application was published on May 15, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): STROBEL, Sebastian (c/o Carl Zeiss SMT GmbHRudolf-Eber-StraBe 273447 Oberkochen)
Abstract:
The invention relates to a method for producing a surface coating (200), which reflects EUV radiation, on a substrate (300), wherein ...