INTERNATIONAL PATENT: CARL ZEISS SMT GMBH FILES APPLICATION FOR "METHOD FOR PRODUCING A COOLING ELEMENT, COOLING ELEMENT FOR OPTICAL ARRANGEMENTS AND OPTICAL ARRANGEMENTS FOR MICROLITHOGRAPHY COMPRISING A COOLING ELEMENT"

GENEVA, June 23 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2023/086111) for "METHOD FOR PRODUCING A COOLING ELEMENT, COOLING ELEMENT FOR OPTICAL ARRANGEMENTS AND OPTICAL ARRANGEMENTS FOR MICROLITHOGRAPHY COMPRISING A COOLING ELEMENT" on Dec 15, 2023. With publication no. WO/2025/124730, the details related to the patent application was published on Jun 19, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): LUTZ, Simon (Rudolf-Eber-Strasse273447 Oberkochen), METZMACHER, Christof (Rudolf-Eber-Strasse273447 Oberkochen), DAUBNER, Sina (Rudolf-Eb...