INTERNATIONAL PATENT: CARL ZEISS SMT GMBH FILES APPLICATION FOR "METHOD FOR OPERATING A SOLID-STATE ACTUATOR IN A MICROLITHOGRAPHIC PROJECTION EXPOSURE SYSTEM, ADAPTIVE OPTICAL ELEMENT AND PROJECTION EXPOSURE SYSTEM"

GENEVA, Dec. 1 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2025/063253) for "METHOD FOR OPERATING A SOLID-STATE ACTUATOR IN A MICROLITHOGRAPHIC PROJECTION EXPOSURE SYSTEM, ADAPTIVE OPTICAL ELEMENT AND PROJECTION EXPOSURE SYSTEM" on May 14, 2025. With publication no. WO/2025/242510, the details related to the patent application was published on Nov 27, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): RAAB, Markus (Rudolf-Eber-Strasse 273447 Oberkochen), SCHAEFER-NOLTE, Eike Oliver (Rudolf-Eber-Strasse 273447 Oberkochen), RICHT, Cornelius (Ru...