GENEVA, Nov. 3 -- CARL ZEISS SMT GMBH (Rudolf-Eber-StraBe 273447 Oberkochen) filed a patent application (PCT/EP2025/058469) for "METHOD FOR OPERATING A MASK INSPECTION DEVICE, EUV CAMERA, MASK INSPECTION DEVICE AND COMPUTER PROGRAM PRODUCT" on Mar 27, 2025. With publication no. WO/2025/223782, the details related to the patent application was published on Oct 30, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): BREKERBOHM, Lutz (Carl-Zeiss-Promenade 107745 Jena), MATEJKA, Ulrich (Carl-Zeiss-Promenade 1007745 Jena), OTT, Julian (Carl-Zeiss-Promenade 107745 Jena), TABBONE, Gilles (Carl-Zeiss-Pr...