INTERNATIONAL PATENT: CARL ZEISS SMT GMBH FILES APPLICATION FOR "METHOD FOR MANUFACTURING AN EUV MIRROR COMPONENT AND INTERMEDIATE PRODUCT OF AN EUV MIRROR COMPONENT"

GENEVA, June 10 -- CARL ZEISS SMT GMBH (Rudolf-Eber-StraBe 273447 Oberkochen) filed a patent application (PCT/EP2024/081858) for "METHOD FOR MANUFACTURING AN EUV MIRROR COMPONENT, AND INTERMEDIATE PRODUCT OF AN EUV MIRROR COMPONENT" on Nov 11, 2024. With publication no. WO/2025/113968, the details related to the patent application was published on Jun 05, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): BROCH, Katharina (Rudolf-Eber-StraBe 273447 Oberkochen), ENKISCH, Hartmut (Rudolf-Eber-StraBe 273447 Oberkochen), STROBEL, Sebastian (Rudolf-Eber-StraBe 273447 Oberkochen), NOTTBOHM, Christoph...