INTERNATIONAL PATENT: CARL ZEISS SMT GMBH FILES APPLICATION FOR "METHOD FOR INSTALLING AN EUV COLLECTOR INTO AN EUV PROJECTION EXPOSURE APPARATUS OR AN ASSEMBLY THEREFOR AND EUV COLLECTOR FOR CARRYING OUT THE METHOD"

GENEVA, Dec. 15 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2025/065525) for "METHOD FOR INSTALLING AN EUV COLLECTOR INTO AN EUV PROJECTION EXPOSURE APPARATUS OR AN ASSEMBLY THEREFOR, AND EUV COLLECTOR FOR CARRYING OUT THE METHOD" on Jun 05, 2025. With publication no. WO/2025/252822, the details related to the patent application was published on Dec 11, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): MERKEL, Wolfgang (Rudolf-Eber-Strasse 273447 Oberkochen), MERSTORF, Marc (Rudolf-Eber-Strasse 273447 Oberkochen), MULLER, Tobias (Rudolf-Eber...