INTERNATIONAL PATENT: CARL ZEISS SMT GMBH FILES APPLICATION FOR "METHOD FOR DETERMINING AT LEAST ONE MANIPULATOR DEGREE OF FREEDOM, METHOD FOR DEFINING AT LEAST ONE VIRTUAL MANIPULATOR, METHOD FOR OPERATING A PROJECTION EXPOSURE APPARATUS AND PROJECTION EXPOSURE APPARATUS"

GENEVA, May 18 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2024/081538) for "METHOD FOR DETERMINING AT LEAST ONE MANIPULATOR DEGREE OF FREEDOM, METHOD FOR DEFINING AT LEAST ONE VIRTUAL MANIPULATOR, METHOD FOR OPERATING A PROJECTION EXPOSURE APPARATUS, AND PROJECTION EXPOSURE APPARATUS" on Nov 07, 2024. With publication no. WO/2025/099169, the details related to the patent application was published on May 15, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): FUCHS, Sebastian (Rudolf-Eber-Strasse 273447 Oberkochen), GRUNER, Toralf (Rudolf-Eber...