GENEVA, June 23 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2024/084970) for "METHOD FOR CROSSTALK MODELLING IN A MULTI-MIRROR ARRAY HAVING MOVABLE INDIVIDUAL MIRRORS" on Dec 06, 2024. With publication no. WO/2025/125090, the details related to the patent application was published on Jun 19, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): FREIMANN, Rolf (Rudolf-Eber-Strasse 273447 Oberkochen)
Abstract:
The invention relates to a method for crosstalk modelling in a multi-mirror array (31) having movable individual mirrors (32), the metho...