INTERNATIONAL PATENT: CARL ZEISS SMT GMBH FILES APPLICATION FOR "METHOD FOR ADJUSTMENT OF AN ILLUMINATION SYSTEM OF A PROJECTION EXPOSURE APPARATUS AND ILLUMINATION SYSTEM FOR CARRYING OUT THE METHOD"

GENEVA, May 17 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2024/081174) for "METHOD FOR ADJUSTMENT OF AN ILLUMINATION SYSTEM OF A PROJECTION EXPOSURE APPARATUS, AND ILLUMINATION SYSTEM FOR CARRYING OUT THE METHOD" on Nov 05, 2024. With publication no. WO/2025/098988, the details related to the patent application was published on May 15, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): LIPPOLDT, Stefan (Rudolf-Eber-Strasse 273447 Oberkochen), BIELING, Stig (Rudolf-Eber-Strasse 273447 Oberkochen), LOSERT, Harald (Rudolf-Eber-Strasse 273447 Ob...