INTERNATIONAL PATENT: CARL ZEISS SMT GMBH FILES APPLICATION FOR "METHOD FOR ADJUSTING AT LEAST ONE SENSOR FOR A PROJECTION EXPOSURE APPARATUS AND PROJECTION EXPOSURE APPARATUS"

GENEVA, June 10 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2024/083911) for "METHOD FOR ADJUSTING AT LEAST ONE SENSOR FOR A PROJECTION EXPOSURE APPARATUS AND PROJECTION EXPOSURE APPARATUS" on Nov 28, 2024. With publication no. WO/2025/114433, the details related to the patent application was published on Jun 05, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): WIESENDAHL, Ulfert (Rudolf-Eber-Strasse 273447 Oberkochen), TESCHKE, Marcel (Rudolf-Eber-Strasse 273447 Oberkochen), FETZER, Christoph (Rudolf-Eber-Strasse 273447 Oberkochen), ABEND,...