GENEVA, April 2 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Str. 273447 Oberkochen) filed a patent application (PCT/EP2024/076443) for "METHOD AND DEVICE FOR MASK REPAIR" on Sep 20, 2024. With publication no. WO/2025/061949, the details related to the patent application was published on Mar 27, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): HERMANNS, Christian Felix (Industriestr. 164380 Rossdorf), RENSING, Christian (Industriestr. 164380 Rossdorf), HOFMANN, Thorsten (Industriestr. 164380 Rossdorf), METTE, Gerson (Industriestr. 164380 Rossdorf)
Abstract:
The present invention relates to a method...