INTERNATIONAL PATENT: CARL ZEISS SMT GMBH FILES APPLICATION FOR "METHOD AND DEVICE FOR CORRECTING AN IMAGING ERROR OF A PARTICLE BEAM DURING SAMPLE PROCESSING"

GENEVA, March 24 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Str. 273447 Oberkochen) filed a patent application (PCT/EP2024/075059) for "METHOD AND DEVICE FOR CORRECTING AN IMAGING ERROR OF A PARTICLE BEAM DURING SAMPLE PROCESSING" on Sep 09, 2024. With publication no. WO/2025/056444, the details related to the patent application was published on Mar 20, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): LAEMMLE, David (Industriestr. 164380 Rossdorf)

Abstract: The present application relates to a method (800, 900) and a device (100) for correcting at least one imaging error of a particle beam (127) ...