GENEVA, May 12 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2024/080553) for "METHOD AND DEVICE FOR CONTROLLING THE TEMPERATURE OF A SENSOR FRAME IN A MICROLITHOGRAPHIC PROJECTION SYSTEM" on Oct 29, 2024. With publication no. WO/2025/093537, the details related to the patent application was published on May 08, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): ZIPS, Julian (c/o Carl Zeiss SMT GmbHRudolf-Eber-StraBe 273447 Oberkochen)
Abstract:
The invention relates to a method for controlling the temperature of a sensor frame (27) in a mic...