GENEVA, Dec. 22 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2025/065484) for "MEASURING DEVICE, LITHOGRAPHY SYSTEM, AND METHOD FOR CALIBRATING A MEASURING DEVICE" on Jun 04, 2025. With publication no. WO/2025/256988, the details related to the patent application was published on Dec 18, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): RETTENMAIER, Thomas (Rudolf-Eber-Strasse 273447 Oberkochen), VAAS, Steffen (Rudolf-Eber-Strasse 273447 Oberkochen), BERGER, Lars (Rudolf-Eber-Strasse 273447 Oberkochen)
Abstract: The invention relates to a me...