INTERNATIONAL PATENT: CARL ZEISS SMT GMBH FILES APPLICATION FOR "MEASUREMENT SYSTEM, MEASUREMENT METHOD WITH THE AID OF SUCH A MEASUREMENT SYSTEM AND PROJECTION EXPOSURE APPARATUS COMPRISING SUCH A MEASUREMENT SYSTEM"

GENEVA, April 14 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2024/075911) for "MEASUREMENT SYSTEM, MEASUREMENT METHOD WITH THE AID OF SUCH A MEASUREMENT SYSTEM, AND PROJECTION EXPOSURE APPARATUS COMPRISING SUCH A MEASUREMENT SYSTEM" on Sep 17, 2024. With publication no. WO/2025/073458, the details related to the patent application was published on Apr 10, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): ENDRES, Martin (Rudolf-Eber-Strasse 273447 Oberkochen), WINKLER, Alexander (Rudolf-Eber-Strasse 273447 Oberkochen), BUSCHLINGER, Robert (Ru...