GENEVA, Sept. 1 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2025/053736) for "MEASUREMENT ARRANGEMENT FOR DETERMINING THE POSITION OF A MOVABLE COMPONENT" on Feb 12, 2025. With publication no. WO/2025/176532, the details related to the patent application was published on Aug 28, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): MANGER, Matthias (Rudolf-Eber-Strasse 273447 Oberkochen), THURNER, Klaus (Rudolf-Eber-Strasse 273447 Oberkochen)
Abstract:
A measurement arrangement (10) for determining the position of a movable component (526) in...