GENEVA, Nov. 3 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Str. 273447 Oberkochen) filed a patent application (PCT/EP2025/059794) for "Inspection apparatus for 3D tomography with improved stand-still performance" on Apr 09, 2025. With publication no. WO/2025/223848, the details related to the patent application was published on Oct 30, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): HUBER, Florian (Rudolf-Eber-Strasse 273447 Oberkochen), JANTZEN, Stephan (Carl-Zeiss-Strasse 2273447 Oberkochen)
Abstract: A dual beam device for three-dimensional volume image generation of semiconductor objects within...