GENEVA, Nov. 3 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2025/061244) for "INSERT FOR A SOURCE CHAMBER OF AN EUV RADIATION SOURCE" on Apr 24, 2025. With publication no. WO/2025/224254, the details related to the patent application was published on Oct 30, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): IRNSTETTER, Johann (Rudolf-Eber-Strasse 273447 Oberkochen), KASTL, Andreas (Rudolf-Eber-Strasse 273447 Oberkochen)
Abstract: An insert (8) for a source chamber (2) of an EUV radiation source (1) comprises one or more heat tubes (41).
For...