INTERNATIONAL PATENT: CARL ZEISS SMT GMBH FILES APPLICATION FOR "ILLUMINATION OPTICAL UNIT FOR PROJECTION LITHOGRAPHY AND METHOD FOR MONITORING SUCH AN ILLUMINATION OPTICAL UNIT"

GENEVA, April 14 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2024/075915) for "ILLUMINATION OPTICAL UNIT FOR PROJECTION LITHOGRAPHY, AND METHOD FOR MONITORING SUCH AN ILLUMINATION OPTICAL UNIT" on Sep 17, 2024. With publication no. WO/2025/073462, the details related to the patent application was published on Apr 10, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): RAMOLLA, Michael (Rudolf-Eber-Strasse 273447 Oberkochen), BAUMER, Florian (Rudolf-Eber-Strasse 273447 Oberkochen), ENDRES, Martin (Rudolf-Eber-Strasse 273447 Oberkochen), FINKEN,...