INTERNATIONAL PATENT: CARL ZEISS SMT GMBH FILES APPLICATION FOR "HIGH-RESOLUTION LOW-DISTORTION IMAGING USING CHARGED-PARTICLE SCANNING MICROSCOPE"

GENEVA, April 6 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2024/076768) for "HIGH-RESOLUTION LOW-DISTORTION IMAGING USING CHARGED-PARTICLE SCANNING MICROSCOPE" on Sep 24, 2024. With publication no. WO/2025/068172, the details related to the patent application was published on Apr 03, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): KLOCHKOV, Dmitry (Rudolf-Eber-Strasse 273447 Oberkochen), FOCA, Eugen (Rudolf-Eber-Strasse 273447 Oberkochen)

Abstract: Techniques are disclosed to obtain microscopic images having high resolution and low dis...