GENEVA, May 26 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2024/079233) for "HEATING HEAD, HEATING DEVICE, AND OPTICAL SYSTEM, IN PARTICULAR EUV LITHOGRAPHY SYSTEM" on Oct 16, 2024. With publication no. WO/2025/103695, the details related to the patent application was published on May 22, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): HEGE, Lukas (Rudolf-Eber-Strasse 273447 Oberkochen), MUEHLKE, Christian (Rudolf-Eber-Strasse 273447 Oberkochen)
Abstract:
The invention relates to a heating head (26) for heating an optical element, compr...