GENEVA, Oct. 18 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2025/057097) for "ENERGY DETECTION ASSEMBLY FOR AN ILLUMINATION SYSTEM OF A MASK INSPECTION SYSTEM FOR USE WITH EUV ILLUMINATION LIGHT" on Mar 14, 2025. With publication no. WO/2025/214717, the details related to the patent application was published on Oct 16, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): MATEJKA, Ulrich (Carl-Zeiss-Promenade 1007745 Jena), LAKSHMANAN, Senthil (Carl-Zeiss-Promenade 1007745 Jena), RODEL, Christian (Carl-Zeiss-Promenade 1007745 Jena), LANGLE, Mari...