GENEVA, Feb. 3 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2024/071324) for "DRIVE DEVICE, OPTICAL SYSTEM AND LITHOGRAPHY APPARATUS" on Jul 26, 2024. With publication no. WO/2025/021992, the details related to the patent application was published on Jan 30, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): HERBST, Oliver (Rudolf-Eber-Strasse 273447 Oberkochen), WALZ, Stefan (Rudolf-Eber-Strasse 273447 Oberkochen)
Abstract:
A drive device (100) for driving at least one actuator (200) for actuating an optical element (310) of an optical sys...