GENEVA, Feb. 2 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2025/070992) for "DEVICE FOR PIVOTING AN OPTICAL COMPONENT INTO A BEAM PATH OF A SYSTEM FOR SEMICONDUCTOR TECHNOLOGY, AND SYSTEM FOR SEMICONDUCTOR TECHNOLOGY" on Jul 22, 2025. With publication no. WO/2026/022148, the details related to the patent application was published on Jan 29, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): FENKL, Karl (Rudolf-Eber-Strasse 273447 Oberkochen), LOHMEIER, Michael (Rudolf-Eber-Strasse 273447 Oberkochen), MELZOW, Frank (Rudolf-Eber-Strasse 273447 ...