GENEVA, Oct. 27 -- CARL ZEISS SMT GMBH (Rudolf-Eber-StraBe 273447 Oberkochen) filed a patent application (PCT/EP2025/060184) for "DEVICE FOR CAPTURING IMAGES OF MICRO- AND/OR NANOSTRUCTURES" on Apr 14, 2025. With publication no. WO/2025/219305, the details related to the patent application was published on Oct 23, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): VAN DRIEL, Martin (Carl-Zeiss-Promenade 107745 Jena)
Abstract: The invention relates to a device (1) for capturing images of micro- and/or nanostructures, in particular structures on microlithographic masks The device (1) comprises a...