GENEVA, Aug. 19 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2025/052696) for "DEFECT REVIEW OF SAMPLES WITH UN-PATTERNED SURFACE" on Feb 03, 2025. With publication no. WO/2025/168504, the details related to the patent application was published on Aug 14, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): SCHUETZ, Andreas (Carl-Zeiss-Strasse 2273447 Oberkochen), BESTEIRO, Pedro (Avenida cidade de Montgeron,1694490-402 Povoa de Varzim)
Abstract:
A method for review of a plurality of anomalies on an un-patterned surface of a sample is provide...