GENEVA, Oct. 4 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2025/058279) for "CONTROL DEVICE, OPTICAL SYSTEM AND LITHOGRAPHY APPARATUS" on Mar 26, 2025. With publication no. WO/2025/202291, the details related to the patent application was published on Oct 02, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): DEL TEDESCO NARITA, Paulo Edward (Rudolf-Eber-Strasse 273447 Oberkochen), HERBST, Oliver (Rudolf-Eber-Strasse 273447 Oberkochen)
Abstract: The invention relates to a control device (100) for controlling at least one actuator (200) for a...