GENEVA, Sept. 8 -- CARL ZEISS SMT GMBH (Rudolf-Eber-StraBe 273447 Oberkochen) filed a patent application (PCT/EP2025/054623) for "CONTAMINATION HANDLING IN METROLOGY SYSTEMS" on Feb 20, 2025. With publication no. WO/2025/180952, the details related to the patent application was published on Sep 04, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): KORB, Thomas (Rudolf-Eber-Strasse 273447 Oberkochen), SCHWARZ, Daniel (Rudolf-Eber-Strasse 273447 Oberkochen), SRIKANTHA, Abhilash (Rudolf-Eber-Strasse 273447 Oberkochen), TYTKO, Darius (Rudolf-Eber-Strasse 273447 Oberkochen), DREWS, Ullrich (Carl-Ze...