INTERNATIONAL PATENT: CARL ZEISS SMT GMBH FILES APPLICATION FOR "COMPENSATION OF OPERATIONALLY INDUCED THERMAL DEFORMATIONS IN THE MANUFACTURING PROCESS OF AN OPTICAL ELEMENT UNDER THERMAL CONTROL DURING OPERATION"

GENEVA, May 12 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2024/080589) for "COMPENSATION OF OPERATIONALLY INDUCED THERMAL DEFORMATIONS IN THE MANUFACTURING PROCESS OF AN OPTICAL ELEMENT UNDER THERMAL CONTROL DURING OPERATION" on Oct 29, 2024. With publication no. WO/2025/093552, the details related to the patent application was published on May 08, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): SCHURER-KOCH, Johannes (Rudolf-Eber-Strasse 273447 Oberkochen), LORENZ, Maike (Rudolf-Eber-Strasse 273447 Oberkochen), DIRAUF, Andre (Rudolf-Eber...