GENEVA, Nov. 17 -- CARL ZEISS SMT GMBH (Rudolf-Eber-StraBe 273447 Oberkochen) filed a patent application (PCT/EP2025/059953) for "COLLECTOR DEVICE, WAFER INSPECTION APPARATUS HAVING A COLLECTOR DEVICE" on Apr 10, 2025. With publication no. WO/2025/233082, the details related to the patent application was published on Nov 13, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): SCHWAB, Markus (Rudolf-Eber-StraBe 273447 Oberkochen), PATRA, Michael (Rudolf-Eber-StraBe 273447 Oberkochen)
Abstract: Collector device for collecting the electromagnetic radiation (30) emitted by a radiation source (14), ...