INTERNATIONAL PATENT: CARL ZEISS SMT GMBH FILES APPLICATION FOR "ARRANGEMENT COMPRISING A MICROLITHOGRAPHIC PROJECTION SYSTEM AND A WALL ELEMENT FOR THERMAL SHIELDING AND PROJECTION EXPOSURE SYSTEM"

GENEVA, Nov. 24 -- CARL ZEISS SMT GMBH (Rudolf-Eber-StraBe 273447 Oberkochen) filed a patent application (PCT/EP2025/062566) for "ARRANGEMENT COMPRISING A MICROLITHOGRAPHIC PROJECTION SYSTEM AND A WALL ELEMENT FOR THERMAL SHIELDING, AND PROJECTION EXPOSURE SYSTEM" on May 08, 2025. With publication no. WO/2025/237794, the details related to the patent application was published on Nov 20, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): SCHAUB, Thomas (Rudolf-Eber-StraBe 273447 Oberkochen), OPFERKUCH, Johannes (Rudolf-Eber-StraBe 273447 Oberkochen), PEICHL, Roland (Rudolf-Eber-StraBe 273447 Obe...