GENEVA, Nov. 24 -- CARL ZEISS SMT GMBH (Rudolf-Eber-StraBe 273447 Oberkochen) filed a patent application (PCT/EP2025/062368) for "ARRANGEMENT AND METHOD FOR CALIBRATING A MEMS WITH MICROMIRRORS" on May 06, 2025. With publication no. WO/2025/237743, the details related to the patent application was published on Nov 20, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): BAUMER, Florian (Rudolf-Eber-StraBe 273447 Oberkochen), HYBL, Ondrej (Rudolf-Eber-StraBe 273447 Oberkochen), BOL, Johannes (Rudolf-Eber-StraBe 273447 Oberkochen)
Abstract: The invention relates to an arrangement (100) for calibra...