GENEVA, Feb. 2 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2025/071495) for "APPARATUS FOR INSPECTING AN OBJECT PERTAINING TO EUV SEMICONDUCTOR TECHNOLOGY" on Jul 25, 2025. With publication no. WO/2026/022360, the details related to the patent application was published on Jan 29, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): DOERING, Dirk (Carl-Zeiss-Promenade 1007745 Jena), ANTRACK, Torsten (Carl-Zeiss-Promenade 1007745 Jena), TANG, Ziyao (Carl-Zeiss-Promenade 1007745 Jena)
Abstract: The invention relates to an apparatus (51) for inspe...