GENEVA, Oct. 13 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2025/057522) for "APPARATUS, HOLDING DEVICE, ARRANGEMENT, SYSTEM AND METHOD FOR HOLDING AN OPTICAL ELEMENT; LITHOGRAPY SYSTEM" on Mar 19, 2025. With publication no. WO/2025/209839, the details related to the patent application was published on Oct 09, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): WEBER, Ulrich (Rudolf-Eber-Strasse 273447 Oberkochen)
Abstract: The invention relates to an apparatus (1) for holding an optical element (2), in particular an optical element of a lith...