GENEVA, Feb. 3 -- CARL ZEISS SMT GMBH (Rudolf-Eber-StraBe 273447 Oberkochen) filed a patent application (PCT/EP2024/070404) for "3D TOMOGRAPHY WITH REDUCED DRIFT ERRORS" on Jul 18, 2024. With publication no. WO/2025/021642, the details related to the patent application was published on Jan 30, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): MAYER, Thomas (Rudolf-Eber-Strasse 273447 Oberkochen)
Abstract:
A method and a dual beam device for three-dimensional volume image generation of semiconductor objects within a wafer are provided. The method and the dual beam device provide higher accur...