GENEVA, Feb. 2 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Str. 273447 Oberkochen), CARL ZEISS SMS LTD. (HaDolev 3 (PO Box 32),Bar Lev Industrial Park2015600 D.N. Misgav) filed a patent application (PCT/EP2024/070960) for "TDI CAMERA SYNCHRONIZATION FOR MASK INSPECTION SYSTEM" on Jul 24, 2024. With publication no. WO/2026/021666, the details related to the patent application was published on Jan 29, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): THURNER, Klaus (Rudolf-Eber-Str. 273447 Oberkochen), NAIM, Ronen (3, Dolev2015600 Misgav)
Abstract: An apparatus for inspection of a sample, the apparatus...