INTERNATIONAL PATENT: CARL ZEISS SMT GMBH, CARL ZEISS MULTISEM GMBH FILES APPLICATION FOR "ARCHITECTURE OF CHARGED PARTICLE BEAM SYSTEM FOR INLINE-SEMICONDUCTOR APPLICATIONS"

GENEVA, Nov. 24 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen), CARL ZEISS MULTISEM GMBH (Carl-Zeiss-Strasse 2273447 Oberkochen) filed a patent application (PCT/EP2025/062869) for "ARCHITECTURE OF CHARGED PARTICLE BEAM SYSTEM FOR INLINE-SEMICONDUCTOR APPLICATIONS" on May 12, 2025. With publication no. WO/2025/237883, the details related to the patent application was published on Nov 20, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): ZEIDLER, Dirk (Rudolf-Eber-Strasse 273447 Oberkochen), LOOPSTRA, Erik (Rudolf-Eber-Strasse 273447 Oberkochen)

Abstract: An improved architectur...