INTERNATIONAL PATENT: CARL ZEISS SMT GMBH, ASML NETHERLANDS B.V. FILES APPLICATION FOR "METHOD OF OPERATING A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS"

GENEVA, March 17 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen), ASML NETHERLANDS B.V. (De Run 65015504 DR Veldhoven) filed a patent application (PCT/EP2024/074798) for "METHOD OF OPERATING A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS" on Sep 05, 2024. With publication no. WO/2025/051840, the details related to the patent application was published on Mar 13, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): FUCHS, Sebastian (Rudolf-Eber-Strasse 273447 Oberkochen), FISCHBACH, Joachim (Rudolf-Eber-Strasse 273447 Oberkochen), VON HODENBERG, Martin (Rudolf-Eber-Strasse 273447 ...