GENEVA, Aug. 11 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen), ASML NETHERLANDS B.V. (De Run 65015504 DR Veldhoven) filed a patent application (PCT/EP2025/051785) for "COLLECTOR MIRROR AND COLLECTOR MIRROR ASSEMBLY FOR LITHOGRAPHY" on Jan 24, 2025. With publication no. WO/2025/162830, the details related to the patent application was published on Aug 07, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): SCHIENBEIN, Ralf (Rudolf-Eber-Strasse 273447 Oberkochen), WEISS, Gundula (Rudolf-Eber-Strasse 273447 Oberkochen), SHRIYAN, Karthik Sanjay (De Run 65015504 DR Veldhoven), VAN DE...