INTERNATIONAL PATENT: CARL ZEISS MULTISEM GMBH FILES APPLICATION FOR "PRIMARY CHARGED PARTICLE BEAM ABERRATION FOR MULTI-BEAM SCANNING CHARGED PARTICLE MICROSCOPE BASED ON MEASUREMENTS ON SECONDARY CHARGED PARTICLE BEAMS"

GENEVA, Nov. 17 -- CARL ZEISS MULTISEM GMBH (Carl-Zeiss-Strasse 2273447 Oberkochen) filed a patent application (PCT/EP2025/062655) for "PRIMARY CHARGED PARTICLE BEAM ABERRATION FOR MULTI-BEAM SCANNING CHARGED PARTICLE MICROSCOPE BASED ON MEASUREMENTS ON SECONDARY CHARGED PARTICLE BEAMS" on May 08, 2025. With publication no. WO/2025/233473, the details related to the patent application was published on Nov 13, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): DIETERLE, Thomas (Rudolf-Eber-Strasse 273447 Oberkochen), TRATZMILLER, Benedikt (Rudolf-Eber-Strasse 273447 Oberkochen), MUELLER, Ingo (R...