GENEVA, Oct. 4 -- CARL ZEISS MULTISEM GMBH (Carl-Zeiss-Str. 2273447 Oberkochen) filed a patent application (PCT/EP2025/057781) for "MULTI ELECTRON-BEAM SYSTEM FOR INSPECTION WITH BACKSCATTERED ELECTRONS" on Mar 21, 2025. With publication no. WO/2025/202056, the details related to the patent application was published on Oct 02, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): ZEIDLER, Dirk (Rudolf-Eber-Strasse 273447 Oberkochen), SCHMID, Thomas (Rudolf-Eber-Strasse 273447 Oberkochen), MENKE, Felix (Carl-Zeiss-Strasse 2273447 Oberkochen)
Abstract: A multi-beam electron system with a backscatte...