GENEVA, May 17 -- CARL ZEISS MULTISEM GMBH (Carl-Zeiss-Strasse 2273447 Oberkochen) filed a patent application (PCT/EP2024/025311) for "MULTI-BEAM CHARGED PARTICLE MICROSCOPE FOR INSPECTION WITH REDUCED CHARGING EFFECTS" on Oct 24, 2024. With publication no. WO/2025/098639, the details related to the patent application was published on May 15, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): SCHUBERT, Stefan (Carl-Zeiss-Strasse 2273447 Oberkochen), DIETERLE, Thomas (Rudolf-Eber-Strasse 273447 Oberkochen), MIKSCH, Bjoern (Rudolf-Eber-Strasse 273447 Oberkochen), MUELLER, Ingo (Rudolf-Eber-Strass...