GENEVA, Oct. 5 -- CANON KABUSHIKI KAISHA (30-2, Shimomaruko 3-chome, Ohta-ku, Tokyo1468501), キヤノン株式会社 (東京都大田区下丸子3丁目30番2号) filed a patent application (PCT/JP2025/006049) for "SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ARTICLE MANUFACTURING METHOD" on Feb 21, 2025. With publication no. WO/2025/204365, the details related to the patent application was published on Oct 02, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WI...