INTERNATIONAL PATENT: BUHLER AG, ADVANCED ENERGY INDUSTRIES, INC. FILES APPLICATION FOR "RF SPUTTERING OF MULTIPLE ELECTRODES WITH OPTIMIZED PLASMA COUPLING THROUGH THE IMPLEMENTATION OF CAPACITIVE AND INDUCTIVE COMPONENTS"

GENEVA, Feb. 18 -- BUHLER AG (Gupenstrasse 59240 Uzwil), ADVANCED ENERGY INDUSTRIES, INC. (1625 Sharp Point Dr.Fort Collins, Colorado 80525) filed a patent application (PCT/US2024/040831) for "RF SPUTTERING OF MULTIPLE ELECTRODES WITH OPTIMIZED PLASMA COUPLING THROUGH THE IMPLEMENTATION OF CAPACITIVE AND INDUCTIVE COMPONENTS" on Aug 02, 2024. With publication no. WO/2025/034594, the details related to the patent application was published on Feb 13, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): NAUMAN, Ken (c/o Buhler AGGupenstrasse 59240 Uzwil), WATANABE, Masahiro (c/o Advanced Energy Indu...