INTERNATIONAL PATENT: BROOKS AUTOMATION US, LLC FILES APPLICATION FOR "VISION BASED POSITION FEEDBACK FOR SUBSTRATE HANDLERS"

GENEVA, Oct. 28 -- BROOKS AUTOMATION US, LLC (15 Elizabeth DriveChelmsford, MA 01824) filed a patent application (PCT/US2025/025285) for "VISION BASED POSITION FEEDBACK FOR SUBSTRATE HANDLERS" on Apr 18, 2025. With publication no. WO/2025/222074, the details related to the patent application was published on Oct 23, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): MOURA, Jairo, T. (93 Bringham StreetMarlborough, MA 01752), TSANG, Vincent (31 Hillside RdLincolin, MA 01773), YIP, Florence (15 Elizabeth DrChelmsford, MA 01824)

Abstract: A substrate processing apparatus including a frame and a s...