INTERNATIONAL PATENT: BROOKS AUTOMATION US, LLC FILES APPLICATION FOR "SUBSTRATE PROCESSING APPARATUS WITH SUBSTRATE FEED THROUGH BYPASS AND METHOD THEREFOR"

GENEVA, Nov. 11 -- BROOKS AUTOMATION US, LLC (15 Elizabeth DriveChelmsford, MA 01824) filed a patent application (PCT/US2024/031358) for "SUBSTRATE PROCESSING APPARATUS WITH SUBSTRATE FEED THROUGH BYPASS AND METHOD THEREFOR" on May 29, 2024. With publication no. WO/2025/230551, the details related to the patent application was published on Nov 06, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): AUDEBRAND, Emilien, J C (39 Kings Grant RoadMarlborough, MA 01752), SHARROCK, Leigh, F (5 Meetinghouse DriveLondonderry, NH 03053)

Abstract: A substrate processing apparatus includes a first transpor...