GENEVA, March 10 -- BROOKS AUTOMATION US, LLC (15 Elizabeth DriveChelmsford, MA 01824) filed a patent application (PCT/US2024/045027) for "SUBSTRATE PROCESSING APPARATUS" on Sep 03, 2024. With publication no. WO/2025/050119, the details related to the patent application was published on Mar 06, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): McLELLAN, Matthew, J. (15 Elizabeth DriveChelmsford, MA 01824), CAVENEY, Robert, T. (12 Ryan Farm RdWindham, NH 03087)
Abstract:
A substrate transport apparatus includes a frame, a first SCARA arm coupled to the frame at a shoulder axis of rotation th...