INTERNATIONAL PATENT: BROOKS AUTOMATION US, LLC FILES APPLICATION FOR "SUBSTRATE HANDLER END EFFECTOR VIBRATION ISOLATION AND METHOD THERFOR"

GENEVA, Oct. 20 -- BROOKS AUTOMATION US, LLC (15 Elizabeth DriveChelmsford, MA 01824) filed a patent application (PCT/US2025/023996) for "SUBSTRATE HANDLER END EFFECTOR VIBRATION ISOLATION AND METHOD THERFOR" on Apr 10, 2025. With publication no. WO/2025/217354, the details related to the patent application was published on Oct 16, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): MOURA, T., Jairo (93 Brigham StreetMarlborough, MA 01752), TSANG, W., Vincent (31 Hillside RdLincoln, MA 01773), YIP, Florence (15 Elizabeth DriveChelmsford, MA 01824)

Abstract: A substrate transport apparatus inclu...