INTERNATIONAL PATENT: BROOKS AUTOMATION (GERMANY) GMBH FILES APPLICATION FOR "VACUUM CHAMBER, METHOD AND SYSTEM FOR TREATING A OF SEMICONDUCTOR CARRIER DEVICES"

GENEVA, Nov. 10 -- BROOKS AUTOMATION (GERMANY) GMBH (Daimlerstrasse 778256 SteiBlingen) filed a patent application (PCT/IB2025/054450) for "VACUUM CHAMBER, METHOD AND SYSTEM FOR TREATING A OF SEMICONDUCTOR CARRIER DEVICES" on Apr 29, 2025. With publication no. WO/2025/229525, the details related to the patent application was published on Nov 06, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): BAUMEISTER, Cornelia (LohrstraBe 1478647 Trossingen)

Abstract: Provided is a vacuum chamber for treating a semiconductor carrier device, wherein the vacuum chamber is configured to receive the semicond...